Microelectrostrictive Actuator With Large Out-of-Plane Deformation for Flow-Control Application

  title={Microelectrostrictive Actuator With Large Out-of-Plane Deformation for Flow-Control Application},
  author={Alongkorn Pimpin and Yuji Suzuki and Nobuhide Kasagi},
  journal={Journal of Microelectromechanical Systems},
We have established methods for the design and fabrication of a novel MEMS actuator for flow control based on the electrostrictive principle. Patterned metal electrodes were employed in order to obtain large out-of-plane deformation. A series of finite-element method (FEM) analyses of the electrical and strain fields was performed in order to optimize the design parameters. The maximum deformation for 2-mm-diameter actuators reaches 112 mum, which is 5.6% of the actuator diameter and six times… CONTINUE READING
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