Microelectrostrictive Actuator With Large Out-of-Plane Deformation for Flow-Control Application

@article{Pimpin2007MicroelectrostrictiveAW,
  title={Microelectrostrictive Actuator With Large Out-of-Plane Deformation for Flow-Control Application},
  author={Alongkorn Pimpin and Yuji Suzuki and Nobuhide Kasagi},
  journal={Journal of Microelectromechanical Systems},
  year={2007},
  volume={16},
  pages={753-764}
}
We have established methods for the design and fabrication of a novel MEMS actuator for flow control based on the electrostrictive principle. Patterned metal electrodes were employed in order to obtain large out-of-plane deformation. A series of finite-element method (FEM) analyses of the electrical and strain fields was performed in order to optimize the design parameters. The maximum deformation for 2-mm-diameter actuators reaches 112 mum, which is 5.6% of the actuator diameter and six times… CONTINUE READING
7 Extracted Citations
27 Extracted References
Similar Papers

Referenced Papers

Publications referenced by this paper.
Showing 1-10 of 27 references

Active control of lifted diffusion flames with arrayed micro actuators

  • N. Kurimoto, Y. Suzuki, N. Kasagi
  • Exp. Fluids, vol. 39, no. 6, pp. 995– 1008, 2005.
  • 2005
1 Excerpt

GA-based feedback control system for drag reduction in turbulent channel flow

  • Y. Suzuki, T. Yoshino, T. Yamagami, N. Kasagi
  • Proc. 4th Int. Symp. TSFP-4, Williamsburg, VA…
  • 2005
1 Excerpt

Active control of turbulent boundary layers

  • R. Rathnasingham, K. S. Breuer
  • J. Fluid Mech., vol. 495, no. 11, pp. 209–233…
  • 2003
1 Excerpt

Electromechanical characterisation of dielectric elastomer planar actuators: Comparative evaluation of different electrode materials and different counterloads

  • F. Carpi, P. Chiarelli, A. Mazzoldi, D. D. Rossi
  • Sens. Actuators A, Phys., vol. 107, no. 1, pp. 85…
  • 2003
2 Excerpts

Jet vectoring using synthetic jets

  • B. L. Smith, A. Glezer
  • J. Fluid Mech., vol. 458, no. 1, pp. 1–34, 2002.
  • 2002
1 Excerpt

Synthetic jets

  • M. Glezer, M. Amitay
  • Annu. Rev. Fluid Mech., vol. 34, pp. 503–529…
  • 2002
1 Excerpt

Similar Papers

Loading similar papers…