Microcircuit Package Gas Analysis

  • Robert W. Thomas
  • Published 1976 in 14th International Reliability Physics Symposium


A method for accurately measuring the ambient gas hermetically sealed within the cavity of micro-electronic package is described. Design consideration for the opening chamber are discussed. The type of mass spectrometer and its operation are detailed for those who might be selecting one as a detector. Finally, the pumping system and an automated data… (More)


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