Microactuators based on ion-implanted dielectric electroactive polymer membranes (EAP)

Abstract

The authors reported on the first ion-implanted dielectric electroactive polymer actuator that was successfully microfabricated and tested. Ion implantation is used to make the surface of the polymer locally conducting. Implanting the compliant electrodes solves the problem of how to microfabricate patterned electrodes having elasticity close to that of the… (More)

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