Micro-tethering for in-process stiction mitigation of highly compliant structures

This work demonstrates, for the first time, a post-fabrication technique for creating highly compliant structures inside a hermetic, wafer-scale encapsulation process. By tethering large, free-moving structures during fabrication this method mitigates in-process stiction by selectively detaching devices post-fabrication. The tethers in this work were… CONTINUE READING