Micro structuration of gaas surface by wet etching: towards a specific surface behavior.

@article{Bienaime2012MicroSO,
  title={Micro structuration of gaas surface by wet etching: towards a specific surface behavior.},
  author={Alex Bienaime and C{\'e}line Elie-Caille and Therese Leblois},
  journal={Journal of nanoscience and nanotechnology},
  year={2012},
  volume={12 8},
  pages={6855-63}
}
Resonant microelectromechanical systems are promising devices for real time and highly sensitive measurements. The sensitivity of such sensors to additional mass loadings which can be increased thanks to the miniaturisation of devices is of prime importance for biological applications. The miniaturisation of structures passes through a photolithographic process and wet chemical etching. So, this paper presents new results on the anisotropic chemical etching of the gallium arsenide (GaAs… CONTINUE READING