Micro-oven-controlled MEMS oscillator with electrostatic tuning for frequency trimming

@article{Pei2018MicroovencontrolledMO,
  title={Micro-oven-controlled MEMS oscillator with electrostatic tuning for frequency trimming},
  author={Binbin Pei and Peng Zhong and Ke Sun and Heng Yang and Xinxin Li},
  journal={2018 IEEE Micro Electro Mechanical Systems (MEMS)},
  year={2018},
  pages={731-734}
}
This paper reports a micro-oven-controlled silicon oscillator with electrostatic tuning for frequency trimming for the first time. The resonator is degenerately doped with phosphorous and micro-oven controlled to achieve ppm level temperature stability, whereas the frequency is tuned by electrostatic force to compensate for fabrication tolerance. This study demonstrates that the resonant frequency of a MEMS resonator can be tuned to 38 ppm, which is equivalent to the line width variation of 0… CONTINUE READING

References

Publications referenced by this paper.
SHOWING 1-10 OF 21 REFERENCES

Frequency trimming of silicon resonators after package with integrated micro-evaporators

  • 2017 IEEE 30th International Conference on Micro Electro Mechanical Systems (MEMS)
  • 2017
VIEW 1 EXCERPT

Micro-oven-controlled N++ [100] length-extensional-mode oscillator for near zero temperature drift

  • 2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS)
  • 2016
VIEW 2 EXCERPTS

Ovenized dual-mode clock (ODMC) based on highly doped single crystal silicon resonators

  • 2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS)
  • 2016
VIEW 1 EXCERPT

In-situ ovenization of Lamé-mode silicon resonators for temperature compensation

  • 2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
  • 2015
VIEW 1 EXCERPT

Temperature Dependence of the Elastic Constants of Doped Silicon

  • Journal of Microelectromechanical Systems
  • 2015
VIEW 1 EXCERPT

Similar Papers

Loading similar papers…