Micro-machined Fabry-Pérot interferometer for thermal infrared


We designed and demonstrated a surface micro-machined tunable Fabry-Pérot interferometer for the thermal infrared wavelengths 7.6 μm <; λ <; 10.3 μm. The device is based on two poly-Si/air distributed Bragg reflectors, separated by an electrostatically adjustable gap. Our work introduces the first micro-machined single… (More)


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