Micro-inductors integrated on silicon for power supply on chip

Abstract

This paper discusses the technologies required to produce magnetics on silicon for power supply on chip. Prototypes of microinductors have been fabricated using techniques such as thick copper coil deposition and improved magnetic materials. The measured maximum Q factor and inductance value are 5 at 2.5MHz and 38 nH/mm, respectively. The impact of seed… (More)

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