Micro-chemo-mechanical hydrogen sensor based on contact resistance of carbon nanotubes array

Abstract

We developed a micro-chemo-mechanical hydrogen sensor with novel sensing mechanism based on contact resistance change of carbon nanotubes array. The sensor is composed of two facing sets of carbon nanotubes (CNT) arrays as the detection material and palladium (Pd)-coated micro-cantilever fabricated on silicon-on-insulator (SOI) wafer. The Pd-silicon bimorph… (More)

6 Figures and Tables

Cite this paper

@article{Kim2013MicrochemomechanicalHS, title={Micro-chemo-mechanical hydrogen sensor based on contact resistance of carbon nanotubes array}, author={M. W. Kim and K. Lee and Hanna Na and D. J. Kwon and J. Choi and J. I. Lee and D. Baek and J. Kim}, journal={2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII)}, year={2013}, pages={2576-2579} }