Micro biochemical sensor based on SOI planar optical waveguide

  title={Micro biochemical sensor based on SOI planar optical waveguide},
  author={Yang Du and Ying Dong},
  booktitle={Photoelectronic Technology Committee Conferences},
A novel biochemical sensor based on planar optical waveguide is presented in this paper. The features of the sensor are as follows, the planar optical waveguide is made of SOI (Silicon-On-Insulator) material, a Mach Zehnder (M-Z) Interferometer structure is adopted as the sensing part, the sensor chip is fabricated using CMOS compatible technology and the size of the sensor chip is on the micron scale. Compared with the traditional biochemical sensors, this new type of sensor has such notable… CONTINUE READING

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