Micro-analysis model for material removal mechanisms of bonnet polishing.

Abstract

There have been many researches concerning the modeling for material removal mechanisms of bonnet polishing (BP) based on the well-known Preston model. However, various parameters involved in the BP process are not formulated and considered in the classical model, such as slurry characteristics, pad properties, bonnet features, and processing conditions. In… (More)
DOI: 10.1364/AO.57.002861

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