Micro actuator array on a flexible sheet — Smart MEMS sheet

Abstract

This paper reports fabrication results of a microactuator array on a flexible sheet. The design was based on the concept of “smart MEMS sheet”, a flexible version of autonomous decentralized MEMS. The fabricated actuator array consists of thermally driven cantilever actuators (ciliary actuators) and the flexible sheet is Kapton® sheet. Both are made of… (More)

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