Micro-Opto-Mechanical Vibration Sensor Integrated on Silicon

  title={Micro-Opto-Mechanical Vibration Sensor Integrated on Silicon},
  author={Eric Ollier and Paul Philippe and C. Chabrol and Patrick Mottier},
A new micro-optical vibration sensor has been achieved by combining “integrated optics” and “micromachining” on silicon technologies. The high sensitivity and the wide frequency range have been obtained by using a multimode section in the optical detection circuit. Three prototypes have been installed successfully in an industrial hydroelectric power plant. 

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