Micro‐XRF excitation in an SEM

  title={Micro‐XRF excitation in an SEM},
  author={Michael Haschke and Frederick C. Eggert and W Timothy Elam},
Electron microscopes are often used for position-sensitive elemental analysis of non-homogeneous material by electron-probe-micro-analysis (EPMA). Due to the high spectral background, this method is limited in sensitivity. The availability of x-ray optics allows the generation of focussed x-ray beams with spot sizes in the micrometer range. The x-ray excited spectra have a better peak-to-background ratio and, therefore, a higher sensitivity. Further, the excitation efficiency for both electrons… CONTINUE READING