Micro‐Transfer‐Printed III‐V‐on‐Silicon C‐Band Semiconductor Optical Amplifiers

@article{Haq2020MicroTransferPrintedIC,
  title={Micro‐Transfer‐Printed III‐V‐on‐Silicon C‐Band Semiconductor Optical Amplifiers},
  author={Bahawal Haq and Sulakshna Kumari and Kasper Van Gasse and Jing Zhang and Agnieszka M. Gocalinska and Emanuele Pelucchi and Brian Corbett and Gunther Roelkens},
  journal={Laser \& Photonics Reviews},
  year={2020},
  volume={14}
}
The micro‐transfer‐printing of prefabricated C‐band semiconductor optical amplifiers (SOAs) on a silicon waveguide circuit is reported. The SOAs are 1.35 mm in length and 40 µm in width. Dense arrays of III‐V SOAs are fabricated on the source InP wafer. These can then be micro‐transfer‐printed on the target SOI photonic circuits in a massively parallel fashion. Additionally, this approach allows for greater flexibility in terms of integrating different epitaxial layer structures on the same SOI… 
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