Methods of preparing cleanroom evacuated to ultra high purity air

@inproceedings{2007MethodsOP,
  title={Methods of preparing cleanroom evacuated to ultra high purity air},
  author={順義 橋本 and 真也 北口 and 恵英 若山},
  year={2007}
}
PROBLEM TO BE SOLVED: To provide a method capable of cleaning the exhaust air from a clean room and the like, and continuously circulating and supplying the same to the clean room and the like for a long period. SOLUTION: In preparing the air of ultrahigh purity from the exhaust air as the process air from a temperature/humidity conditioned-clean work space, and circulating and supplying the same to the clean work space, this method of preparing the air of ultrahigh purity from the clean room… CONTINUE READING