Method for verification of inductor de-embedding accuracy by cross-check of measurements with a LC circuit

Abstract

An innovative method for verification of de-embedding errors after inductor on-wafer measurements is presented. This first de-embedding verification method, there were no references found in literature, is easy to implement by designing a LC circuit with a Metal Insulator Metal (MIM) capacitor inside the Ground-Signal-Ground (GSG) test structure used for… (More)

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5 Figures and Tables