Metal-oxide based, CMOS-compatible ECRAM for Deep Learning Accelerator

  title={Metal-oxide based, CMOS-compatible ECRAM for Deep Learning Accelerator},
  author={Seyoung Kim and J. A. Ott and Takashi Ando and H. Miyazoe and Vijay Narayanan and John Rozen and Teodor K. Todorov and Murat Onen and Tayfun Gokmen and Douglas M. Bishop and Paul M. Solomon and Ko-Tao Lee and Matthew Copel and Damon B. Farmer},
  journal={2019 IEEE International Electron Devices Meeting (IEDM)},
We demonstrate a CMOS-compatible, metal-oxide based Electro-Chemical Random-Access Memory (MO- ECRAM) for high-speed, low-power neuromorphic computing. The device demonstrates symmetric and linear conductance update, large on/off ratio and good retention while also withstanding high temperature treatments necessary for BEOL compatibility. Resistive switching in MO-ECRAM is observed with voltage pulses down to 10 ns and scales exponentially with voltage pulse amplitude, enabling parallel array… Expand

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