Metal hierarchical patterning by direct nanoimprint lithography

@inproceedings{Radha2013MetalHP,
  title={Metal hierarchical patterning by direct nanoimprint lithography},
  author={Boya Radha and Su Hui Lim and Mohammad S M Saifullah and Giridhar U Kulkarni},
  booktitle={Scientific reports},
  year={2013}
}
Three-dimensional hierarchical patterning of metals is of paramount importance in diverse fields involving photonics, controlling surface wettability and wearable electronics. Conventionally, this type of structuring is tedious and usually involves layer-by-layer lithographic patterning. Here, we describe a simple process of direct nanoimprint lithography using palladium benzylthiolate, a versatile metal-organic ink, which not only leads to the formation of hierarchical patterns but also is… CONTINUE READING
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