Metal Ion Implantation for the Fabrication of Stretchable Electrodes on Elastomers

  title={Metal Ion Implantation for the Fabrication of Stretchable Electrodes on Elastomers},
  author={Samuel Rosset and Muhamed Niklaus and P. Dubois and Herbert R Shea},
Here, the use of low-energy metal ion implantation by filtered cathodic vacuum arc to create highly deformable electrodes on polydimethylsiloxane (PDMS) membranes is reported. Implantation leads to the creation of nanometer-size clusters in the first 50 nm below the surface. When the elastomer is stretched, these small clusters can move relative to one another, maintaining electrical conduction at strains of up to 175%. Sheet resistance versus ion dose, resistance versus strain, time stability… CONTINUE READING
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M. Small, W. D. Nix, J. Mater
1992, 7, • 1553

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