Metal-Coated SU-8 Structures for High-Density 3-D Microelectrode Arrays

@article{Kilchenmann2016MetalCoatedSS,
  title={Metal-Coated SU-8 Structures for High-Density 3-D Microelectrode Arrays},
  author={Samuel Kilchenmann and Enrica Rollo and Pietro Maoddi and Carlotta Guiducci},
  journal={Journal of Microelectromechanical Systems},
  year={2016},
  volume={25},
  pages={425-431}
}
Electric fields can be effectively used to sense, manipulate, and move particles in lab-on-a-chip devices. Nevertheless, the throughput of such devices is a critical issue, which can be effectively improved by increasing the height of the microchannels. For this purpose, vertical electrodes are needed in order to apply electrical stimuli homogeneously over… CONTINUE READING