• Chemistry
  • Published 1991

Mechanism of Radiation Damage in SiO_2/Si Induced by vuv Photons : Beam-Induced Physics and Chemistry

@inproceedings{Yunohgami1991MechanismOR,
  title={Mechanism of Radiation Damage in SiO_2/Si Induced by vuv Photons : Beam-Induced Physics and Chemistry},
  author={Takashi Yunohgami and Tatsumi Mizutani and Kazunori Tsujimoto and Keizo Suzuki},
  year={1991}
}

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