Mechanism for secondary electron dopant contrast in the SEM

  title={Mechanism for secondary electron dopant contrast in the SEM},
  author={Sealy and Castell and Wilshaw},
  journal={Journal of electron microscopy},
  volume={49 2},
The growing use of secondary electron imaging in the scanning electron microscope (SEM) to map dopant distributions has stimulated an increasing interest in the mechanism that gives rise to so-called dopant contrast. In this paper a range of experimental results are used to demonstrate the wide applicability of the technique. These results are then incorporated into a model where, in particular, the effect of the surface barrier and the vacuum level are considered. It is found that the dominant… CONTINUE READING
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