Mechanism-based design of precursors for focused electron beam-induced deposition

  title={Mechanism-based design of precursors for focused electron beam-induced deposition},
  author={Will G Carden and Hang Lu and Julie A. Spencer and D. Howard Fairbrother and Lisa McElwee‐White},
  journal={MRS Communications},
Focused electron beam-induced deposition (FEBID) is capable of producing metal-containing nanostructures with lateral resolution on the sub-nanometer scale. Practical application of this nanofabrication technique has been hindered by ligand-derived contamination from precursors developed for thermal deposition methods. Mechanistic insight into FEBID through surface science studies and gas-phase electron-molecule interactions has begun to enable the design of custom FEBID precursors. These… 

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