Mechanism and dynamics of the reaction of XeF2 with fluorinated Si(100): possible role of gas phase dissociation of a surface reaction product in plasmaless etching.

@article{Hefty2009MechanismAD,
title={Mechanism and dynamics of the reaction of XeF2 with fluorinated Si(100): possible role of gas phase dissociation of a surface reaction product in plasmaless etching.},
author={R. C. Hefty and J. R. Holt and M. R. Tate and Sylvia T. Ceyer},
journal={The Journal of chemical physics},
year={2009},
volume={130 16},
pages={
164714
}
}
• Published 28 April 2009
• Physics
• The Journal of chemical physics
Xenon difluoride is observed to react with Si-Si sigma-dimer and sigma-lattice bonds of Si(100)2 x 1 at 150 K by single and two atom abstraction at F coverages above 1 ML. As in the limit of zero F coverage, a measurable fraction of the scattered, gas phase product of single atom abstraction, XeF, is sufficiently internally excited to dissociate into F and Xe atoms before detection. Using the XeF internal energy and orientation distributions determined in the limit of zero coverage, the laws of…
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