Mechanically Modulated Microwave Circulator

  title={Mechanically Modulated Microwave Circulator},
  author={Mustafa Mert Torunbalci and Suresh Sridaran and Richard C. Ruby and Sunil Ashok Bhave},
  journal={2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems \& Eurosensors XXXIII (TRANSDUCERS \& EUROSENSORS XXXIII)},
  • M. M. TorunbalciS. Sridaran S. Bhave
  • Published 1 June 2019
  • Physics, Engineering
  • 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII)
This work presents a differential FBAR circulator that uses the bending mode to mechanically modulate the FBAR mode without any varactors or switches. The differential FBAR circulator achieves a 61.5 dB isolation (IX) with an insertion loss (IL) of 1.8 dB at 2.68 GHz, demonstrating the first MEMS-only circulator. The isolation bandwidth at −25 dB is 4.7 MHz and power handling of the circulator is limited by the FBARs to +34 dBm. 

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