Mechanical-thermal noise in MEMS gyroscopes

  title={Mechanical-thermal noise in MEMS gyroscopes},
  author={R. J. Leland},
  journal={IEEE Sensors Journal},
We derive expressions for the effect of mechanical thermal noise on a vibrational microelectromechanical system gyroscope, including the angle of random walk, the noise equivalent rotation rate, and the spectral density of the noise component of the rate measurement. We explicitly calculate and compare the output signal due to rotation and the output due to noise. We avoid several ambiguities in the literature concerning bandwidth and correctly observe a factor of two reduction in noise power… CONTINUE READING
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