Mechanical stiffness and dissipation in ultrananocrystalline diamond microresonators

@inproceedings{Adiga2009MechanicalSA,
  title={Mechanical stiffness and dissipation in ultrananocrystalline diamond microresonators},
  author={Vivekananda P Adiga and Anirudha V Sumant and Shravan Suresh and Chris Gudeman and Orlando Auciello and John A. Carlisle and Robert W. Carpick},
  year={2009}
}
We have characterized mechanical properties of ultrananocrystalline diamond UNCD thin films grown using the hot filament chemical vapor deposition HFCVD technique at 680 °C, significantly lower than the conventional growth temperature of 800 °C. The films have 4.3% sp2 content in the near-surface region as revealed by near edge x-ray absorption fine structure spectroscopy. The films, 1 m thick, exhibit a net residual compressive stress of 3701 MPa averaged over the entire 150 mm wafer. UNCD… CONTINUE READING
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