Mechanical modelling of capacitive RF MEMS shunt switches


The mechanical response of a RF MEMS shunt connected switch in coplanar waveguide configuration has been studied by using both an analytical approach based on uni-dimensional equations and FEM simulations. The analytical model has been developed for predicting the dynamics of the device, especially concerning its re-configuration time and the energy balance… (More)

8 Figures and Tables


  • Presentations referencing similar topics