Mechanical assessment of suspended ALD thin films by bulge and shaft-loading techniques

@inproceedings{Berdova2014MechanicalAO,
  title={Mechanical assessment of suspended ALD thin films by bulge and shaft-loading techniques},
  author={Maria Berdova and Tuomo Ylitalo and I. Kassamakov and J. Heino and Pekka T{\"o}rm{\"a} and Lauri Kilpi and Helena Ronkainen and Jari Koskinen and Edward H{\ae}ggstr{\"o}m and Sami Franssila},
  year={2014}
}
Abstract We assessed mechanical properties of free-standing atomic-layer-deposited (ALD) Al 2 O 3 thin films, mixed oxide (Al x Ti y O z ) films and Al 2 O 3 /TiO 2 nanolaminates (75 and 200 nm). Using bulge and microelectromechanical system shaft-loading techniques, we evaluated the Young’s modulus, residual stress and ultimate tensile stress of these films and laminates. Fits to the load–displacement curves provided estimates for the residual stress and Young’s modulus. We extracted a… CONTINUE READING

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