Mechanical Properties of Electrodeposited Permalloy Thin Film Measured by using a Tensile Test

@article{Li2007MechanicalPO,
  title={Mechanical Properties of Electrodeposited Permalloy Thin Film Measured by using a Tensile Test},
  author={Xueping Li and Guifu Ding and Hong Wang and Tsuyoshi Ando and Mitsuhiro Shikida and Kenji Sato},
  journal={TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference},
  year={2007},
  pages={555-558}
}
In order to improve the reliability of Micro-electro-mechanical Systems (MEMS) designs, evaluations of the mechanical properties of soft magnetic materials are needed. In this paper, we present a tensile testing method to characterize the mechanical properties of microscale electroplated permalloy (80 wt% Ni, 20 wt% Fe) films. The gauge section of the… CONTINUE READING