Mechanical Coupling of 2D Resonator Arrays for MEMS Filter Applications

@article{Weinstein2007MechanicalCO,
  title={Mechanical Coupling of 2D Resonator Arrays for MEMS Filter Applications},
  author={Dana Weinstein and S. A. Bhave and Mika Tada and Shun Mitarai and Shimpei Morita},
  journal={2007 IEEE International Frequency Control Symposium Joint with the 21st European Frequency and Time Forum},
  year={2007},
  pages={1362-1365}
}
This paper presents a study of mechanical coupling in 2D resonator arrays for filter applications. A robust coupling design for 2D array filters, comprised of weak coupling in one dimension and strong coupling in the second, is demonstrated experimentally and compared with weakly coupled and electrically summed 2D resonator array filters. Effects of inherent disorder in resonator arrays due to fabrication variations are minimized in this mechanical coupling scheme, averaging over resonator… CONTINUE READING
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