Measuring the temperature of microparticles in plasmas.


Temperature sensitive features of particular phosphors were utilized for measuring the temperature T(p) of microparticles, confined in the sheath of a rf plasma. The experiments were performed under variation of argon pressure and rf power of the process plasma. T(p) has been determined by evaluation of characteristic fluorescent lines. The results for T(p… (More)
DOI: 10.1063/1.2987688


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