Measuring the Manufacturing Yield for Processes With Multiple Manufacturing Lines

@article{Tai2012MeasuringTM,
  title={Measuring the Manufacturing Yield for Processes With Multiple Manufacturing Lines},
  author={Y. T. Tai and W. L. Pearn and Chun-Min Kao},
  journal={IEEE Transactions on Semiconductor Manufacturing},
  year={2012},
  volume={25},
  pages={284-290}
}
Process yield is the most common criterion used in the semiconductor manufacturing industry for measuring process performance. In the globally competitive manufacturing environment, photolithography processes involving multiple manufacturing lines are quite common in the Science-Based Industrial Park in Hsinchu, Taiwan, due to economic scale considerations. In this paper, we develop an effective method for measuring the manufacturing yield for photolithography processes with multiple… CONTINUE READING

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