Measuring in the Subnanometer Range: Capacitive and Eddy Current Nanodisplacement Sensors

  title={Measuring in the Subnanometer Range: Capacitive and Eddy Current Nanodisplacement Sensors},
  author={S. Nihtianov},
  journal={IEEE Industrial Electronics Magazine},
  • S. Nihtianov
  • Published 2014
  • Materials Science
  • IEEE Industrial Electronics Magazine
  • In this article, an overview of capacitive and eddy current sensors (ECSs) for measuring very small displacements in the subnanometer range is presented in view of the latest advancements in the field. The need for an accurate displacement/position measurement in such extremely small scales as nanometers and picometers has increased significantly during the last few years. Application examples can be found in high-tech industry, metrology, and space equipment manufacturing. A better… CONTINUE READING
    37 Citations

    Figures from this paper

    Advances in Capacitive, Eddy Current, and Magnetic Displacement Sensors and Corresponding Interfaces
    • 33
    Probe Design for High-Precision Eddy-Current Displacement Sensors
    • 3
    A 19.8-mW Eddy-Current Displacement Sensor Interface With Sub-Nanometer Resolution
    • 6
    Shieldless Eddy-Current Displacement Sensor with Improved Measurement Sensitivity
    Ultrastable and Low-Noise Self-Compensation Method for Circuit Thermal Drift of Eddy Current Sensors Based on Analog Multiplier
    • Highly Influenced
    Research and development of novel wireless digital capacitive displacement sensor
    • 1


    A time/resistor-referenced capacitive sensor interface for displacement measurement in the sub-nanometer range
    • R. Yang, S. Nihtianov
    • Computer Science, Materials Science
    • 2013 IEEE International Symposium on Industrial Electronics
    • 2013
    • 8
    A capacitance-to-digital converter for displacement sensing with 17b resolution and 20μs conversion time
    • 97
    Eddy-Current Sensor Interface for Advanced Industrial Applications
    • 52
    A Low-Power Interface for Eddy Current Displacement Sensors in Sub-Micron Applications
    • 6
    Flexible eddy current sensor array for proximity sensing
    • 56
    New Noncontacting Inductive Analog Proximity and Inductive Linear Displacement Sensors for Industrial Automation
    • 89
    A capacitive sensing technique for measuring displacement with one floating target electrode
    • X. Guo, S. Nihtianov
    • Materials Science
    • 2010 IEEE International Conference on Industrial Technology
    • 2010
    • 6
    Design Strategies for Eddy-Current Displacement Sensor Systems: Review and Recommendations
    • 85
    • Highly Influential
    Application of capacitance techniques in sensor design
    • 182