Measuring in the Subnanometer Range: Capacitive and Eddy Current Nanodisplacement Sensors

@article{Nihtianov2014MeasuringIT,
  title={Measuring in the Subnanometer Range: Capacitive and Eddy Current Nanodisplacement Sensors},
  author={S. Nihtianov},
  journal={IEEE Industrial Electronics Magazine},
  year={2014},
  volume={8},
  pages={6-15}
}
  • S. Nihtianov
  • Published 2014
  • Materials Science
  • IEEE Industrial Electronics Magazine
  • In this article, an overview of capacitive and eddy current sensors (ECSs) for measuring very small displacements in the subnanometer range is presented in view of the latest advancements in the field. The need for an accurate displacement/position measurement in such extremely small scales as nanometers and picometers has increased significantly during the last few years. Application examples can be found in high-tech industry, metrology, and space equipment manufacturing. A better… CONTINUE READING
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