• Physics, Engineering
  • Published in
    Optics & Photonics - Optical…
    2014
  • DOI:10.1117/12.2063446

Measuring deformations with deflectometry

@inproceedings{Li2014MeasuringDW,
  title={Measuring deformations with deflectometry},
  author={Wansong Li and Philipp Huke and Jan Burke and Christoph von Kopylow and Ralf B. Bergmann},
  booktitle={Optics & Photonics - Optical Engineering + Applications},
  year={2014}
}
Phase-measuring deflectometry is a powerful method to measure reflective surfaces. It is relatively easy to extract slope and curvature information from the measured phase maps; however, retrieving shape information depends very sensitively on the calibration of the camera and the geometry of the measurement system. Whereas we have previously demonstrated shape uncertainties below 1 μm, the range below 100 nm is currently inaccessible to deflectometric shape measurement. On the other hand, the… CONTINUE READING

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