Measuring Photolithographic Overlay Accuracy and Critical Dimensions by Correlating Binarized Laplacian of Gaussian Convolutions

@article{Nishihara1988MeasuringPO,
  title={Measuring Photolithographic Overlay Accuracy and Critical Dimensions by Correlating Binarized Laplacian of Gaussian Convolutions},
  author={H. Keith Nishihara and P. A. Crossley},
  journal={IEEE Trans. Pattern Anal. Mach. Intell.},
  year={1988},
  volume={10},
  pages={17-30}
}

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