Measuring Elastoplastic Properties of Thin Films on an Elastic Substrate Using Sharp Indentation

  title={Measuring Elastoplastic Properties of Thin Films on an Elastic Substrate Using Sharp Indentation},
  author={Mingming Zhao and Xi Chen and Yong Xiang and Joost J. Vlassak},
Nanoindentation is a technique commonly used for measuring material elastoplastic properties. In this study, we extend the indentation analysis to an elastoplastic thin film on an elastic substrate. With the assistance of the substrate effect, the film elastic modulus, yield stress, and work hardening exponent can be measured from one simple sharp indentation test with moderate penetration depth. The film elastoplastic properties and film/substrate mismatches are varied over a large range in… CONTINUE READING


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