• Engineering
  • Published in
    Electrical Overstress…
    2010

Measurements to establish process ESD compatibility

@article{Steinman2010MeasurementsTE,
  title={Measurements to establish process ESD compatibility},
  author={Arnold J. Steinman and Leo G. Henry and Marcos Vera Hern{\'a}ndez},
  journal={Electrical Overstress/Electrostatic Discharge Symposium Proceedings 2010},
  year={2010},
  pages={1-8}
}
Currently, there are no standards for establishing equipment or process capability to handle devices of known ESD sensitivity. Correlating verification measurement tools with parameters of device testing is a first step. Measurements with a contacting high impedance voltmeter and ESD event detectors are compared to voltages and discharges of HBM and CDM testing. 

Citations

Publications citing this paper.
SHOWING 1-4 OF 4 CITATIONS

Equipment ESD capability measurements

  • 2013 35th Electrical Overstress/Electrostatic Discharge Symposium
  • 2013
VIEW 4 EXCERPTS
CITES METHODS & BACKGROUND

Measuring handler CDM stress provides guidance for factory static controls

  • Electrical Overstress/Electrostatic Discharge Symposium Proceedings 2014
  • 2014
VIEW 1 EXCERPT
CITES BACKGROUND

Process ESD capability measurements

  • Electrical Overstress / Electrostatic Discharge Symposium Proceedings 2012
  • 2012
VIEW 2 EXCERPTS
CITES BACKGROUND

References

Publications referenced by this paper.
SHOWING 1-5 OF 5 REFERENCES

A Case for Lowering Component Level CDM ESD Specifications and Requirements, Industry Device Council on ESD Target Levels, April 2010, available on the ESD Association website www.esda.org

White Paper
  • 2010
VIEW 2 EXCERPTS

Electrostatic Discharge Sensitivity Testing - Charged Device Model (CDM) - Component Level

S ANSIESD
  • ESD Association,
  • 2009
VIEW 2 EXCERPTS

Process Capability and Transitional Analysis

S. Halperin
  • EOS/ESD Symposium
  • 2008
VIEW 1 EXCERPT

A Case for Lowering Component Level HBM/MM ESD Specifications and Requirements, Industry Device Council for ESD Target Levels, September 2007, available on the ESD Association website www.esda.org

White Paper
  • 2007
VIEW 1 EXCERPT

Measuring Electromagnetic Interference from ESD

V. Kraz
  • Semiconductot Equipment and Materials International (SEMI) Standard SEMI E129-0706 – Guide to Controlling Electrostatic charge in a Semiconductor Manufacturing Facility, Related Information 3, July 2006, www.semi.org
  • 2006
VIEW 1 EXCERPT