Measurements of Young’s Modulus, Poisson’s Ratio, and Tensile Strength of Polysilicon

@inproceedings{Sharpe2000MeasurementsOY,
  title={Measurements of Young’s Modulus, Poisson’s Ratio, and Tensile Strength of Polysilicon},
  author={Norman Sharpe and Bin Yuan and Ranji Vaidyanathan and R. L. Edwards},
  year={2000}
}
New techniques and procedures are described that enable one to measure the mechanical properties of polysilicon films that are 3.5 pm thick. Polysilicon is deposited onto a silicon substrate which is then etched away to leave a tensile specimen in the middle of the die. The grip ends of the structure are glued to the grips of a linear air bearing attached to a piezoelectrically actuated loading system. Strain is measured directly on the specimen with laser interferometry. The specimens are… CONTINUE READING
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