Measurement system for low force and small displacement contacts

@article{Pruitt2004MeasurementSF,
  title={Measurement system for low force and small displacement contacts},
  author={B. L. Pruitt and Woo-Tae Park and T. W. Kenny},
  journal={Journal of Microelectromechanical Systems},
  year={2004},
  volume={13},
  pages={220-229}
}
To support the continued miniaturization of electrical contacts in multichip systems, three-dimensional (3-D) systems, wafer probe cards, and MEMS relays, there is a need for combined measurements of electrical and mechanical phenomena during contact formation. We have carried out a study of electrical contacts in the nN-mN force range for future generation probe cards and novel electronic packaging. One critical phenomenon in the contact formation process is nm-scale deformation of the… CONTINUE READING
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Metallic Materials Specification Handbook, Fourth ed

  • R. B. Ross, Ed
  • 1992
Highly Influential
3 Excerpts

Aspects of contact mechanics

  • K. L. Johnson
  • Proc. IMechE 14, 1987.
  • 1987
Highly Influential
3 Excerpts

Piezoresistive cantilevers and measurement system for characterizing low force electrical contacts

  • B. L. Pruitt, T. W. Kenny
  • Sens. Actuators, Phys. A, vol. 104, pp. 68–77…
  • 2003
1 Excerpt

Low force contact resistance measurements of thin film gold using micromachined piezoresistive cantilevers

  • B. L. Pruitt
  • Proc. MRS Fall Meeting, Boston, MA, 2001.
  • 2001
1 Excerpt

Method of Making and Using Lithographic Contact Springs

  • G. L. Mathieu, FormFactor, Inc
  • U.S. Pat. 6 268 015, 2001.
  • 2001
1 Excerpt

Design of piezoresistive cantilevers for low force electrical contact measurements

  • B. Pruitt
  • Proc. IMECE: 2000 International Mechanical…
  • 2000
1 Excerpt

Lateral MEMS microcontact considerations

  • E.J.J. Kruglick, K.S.J. Pister
  • J. Microelectromech. Syst., vol. 8, pp. 264–271…
  • 1999

Microswitches and microrelays with a view toward microwave applications

  • P.M.M. Zavracky, E. Nicol, R. H. Morrison, D. Potter
  • Int J RF Microwave Comput Aided Eng., vol. 9, no…
  • 1999
1 Excerpt

Photolithographically Patterned Spring Contact and Apparatus and Methods for Electrically Contacting Devices

  • D. Smith, Xerox Corporation
  • U.S. Pat. 5 944 537, 1999.
  • 1999

Thermally actuated mircoprobes for a new wafer probe card

  • Y. Zhang
  • J. Microelectromech. Syst., vol. 8, pp. 43–49…
  • 1999
1 Excerpt

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