Measurement system for low force and small displacement contacts

  title={Measurement system for low force and small displacement contacts},
  author={B. L. Pruitt and Woo-Tae Park and T. W. Kenny},
  journal={Journal of Microelectromechanical Systems},
To support the continued miniaturization of electrical contacts in multichip systems, three-dimensional (3-D) systems, wafer probe cards, and MEMS relays, there is a need for combined measurements of electrical and mechanical phenomena during contact formation. We have carried out a study of electrical contacts in the nN-mN force range for future generation probe cards and novel electronic packaging. One critical phenomenon in the contact formation process is nm-scale deformation of the… CONTINUE READING
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