Measurement of thermal conductivity of thin films with a Si-N membrane-based microcalorimeter

@inproceedings{Zink2005MeasurementOT,
  title={Measurement of thermal conductivity of thin films with a Si-N membrane-based microcalorimeter},
  author={Barry Lee Zink and Bernard Revaz and J. J. Cherry and Frances Hellman},
  year={2005}
}
We describe a method of measuring thermal conductivity of films as thin as 15 nm from 2–300 K and in magnetic fields up to at least 8 T using a silicon-nitride membrane based microcalorimeter. The thermal transport in the membrane is measured before and after a sample film is deposited on the membrane. Accurate knowledge of the geometry of the microcalorimeter allows the thermal conductivity of the sample film to be determined from the difference of these measurements. We demonstrate the method… CONTINUE READING