Measurement of the Anisotropy of Young's Modulus in Single-Crystal Silicon

  title={Measurement of the Anisotropy of Young's Modulus in Single-Crystal Silicon},
  author={E. Boyd and D. Uttamchandani},
  journal={Journal of Microelectromechanical Systems},
  • E. Boyd, D. Uttamchandani
  • Published 2012
  • Materials Science
  • Journal of Microelectromechanical Systems
  • In (100) silicon wafers, the most commonly used in microelectromechanical systems (MEMS) fabrication, the value of Young's modulus of a MEMS structure can vary by over 20%, depending on the structure's orientation on the wafer surface. This anisotropy originates from the crystal structure of silicon. We have directly measured the anisotropy of Young's modulus in the (100) plane of silicon from the measured resonance frequencies of a “wagon-wheel” test structure comprising an arc of identical… CONTINUE READING
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