Measurement of ion energy distributions using a combined energy and mass analyzer.

@article{Walton2007MeasurementOI,
  title={Measurement of ion energy distributions using a combined energy and mass analyzer.},
  author={S. G. Walton and Richard F. Fernsler and Darin Leonhardt},
  journal={The Review of scientific instruments},
  year={2007},
  volume={78 8},
  pages={083503}
}
A method is described for measuring ion energy distributions using a commercially available, combined energy analyzer/mass spectrometer. The distributions were measured at an electrode located adjacent to pulsed, electron beam-generated plasmas produced in argon. The method uses energy-dependent tuning and was tested for various plasma conditions. The… CONTINUE READING