Measurement of elastic modulus s/sub 11//sup D/ of thin film ZnO by resonance method

@article{Jade1999MeasurementOE,
  title={Measurement of elastic modulus s/sub 11//sup D/ of thin film ZnO by resonance method},
  author={S A Jade and J G Smits},
  journal={IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control},
  year={1999},
  volume={46},
  pages={768-770}
}
  • S A Jade, J G Smits
  • Published 1999 in
    IEEE Transactions on Ultrasonics, Ferroelectrics…
The elastic modulus of thin film ZnO has been measured by attaching a Si-ZnO strip to a ceramic bimorph, deflecting the latter with an electric signal, and measuring the resonance frequencies of the Si-ZnO strip. The resonance frequencies of the Si-ZnO strip depend on the properties of both Si and ZnO. The properties of Si are known, and, thus, the elastic… CONTINUE READING