Measurement of effective piezoelectric coefficients of PZT thin films for energy harvesting application with interdigitated electrodes

  title={Measurement of effective piezoelectric coefficients of PZT thin films for energy harvesting application with interdigitated electrodes},
  author={Nachiappan Chidambaram and Andrea Mazzalai and Paul Muralt},
  journal={IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control},
Interdigitated electrode (IDE) systems with lead zirconate titanate (PZT) thin films play an increasingly important role for two reasons: first, such a configuration generates higher voltages than parallel plate capacitor-type electrode (PPE) structures, and second, the application of an electric field leads to a compressive stress component in addition to the overall stress state, unlike a PPE structure, which results in tensile stress component. Because ceramics tend to crack at relatively… CONTINUE READING
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