Measurement of attraction force between AFM tip and surface of dielectric thin films with DC-bias

@inproceedings{Zhu2005MeasurementOA,
  title={Measurement of attraction force between AFM tip and surface of dielectric thin films with DC-bias},
  author={Yan Feng Zhu and Chun Hui Xu and B. Wang and Chang Ho Woo},
  year={2005}
}
Abstract The attraction force between the AFM tip and the surface of sputtered dielectric thin films (SiO 2 and ZrO 2 ) was measured with atomic force microscope (AFM) by applying DC-bias between the AFM tip and the n-Si substrate. Under 0 electric field, there exists van der Waals interaction between the AFM tip and the surface of dielectric films. When DC voltages are applied, the attraction force increases obviously for thin SiO 2 (5.2 nm) and ZrO 2 (6.8 nm) films due to the columbic… CONTINUE READING