Materials and technologies for fabrication of three-dimensional microstructures with sub-100 nm feature sizes by two-photon polymerization

  title={Materials and technologies for fabrication of three-dimensional microstructures with sub-100 nm feature sizes by two-photon polymerization},
  author={Frank Burmeister and S{\"o}nke Steenhusen and Ruth Houbertz and Uwe D. Zeitner and Stefan Nolte and Andreas T{\"u}nnermann},
  journal={Journal of Laser Applications},
The fabrication of sub-100 nm feature sizes in large-scale three-dimensional (3D) geometries by two-photon polymerization requires a precise control of the polymeric reactions as well as of the intensity distribution of the ultrashort laser pulses. The authors, therefore, investigate the complex interplay of photoresist, processing parameters, and focusing optics. New types of inorganic– organic hybrid polymers are synthesized and characterized with respect to achievable structure sizes and… 

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