Material selection for MEMS devices
@article{Pratap2007MaterialSF, title={Material selection for MEMS devices}, author={Rudra Pratap and Arumugam Arunkumar}, journal={Indian Journal of Pure \& Applied Physics}, year={2007}, volume={45}, pages={358-367} }
As MEMS design matures and migrates from process centric design to performance based design, MEMS designers would need a rational method for selecting an appropriate material that is not based on ease of processing alone. While there is a growing number of thin film materials that can be used in micromachining for MEMS devices, the selection of a particular material is rarely based on quantifiable criterion that relates directly to the optimum performance of the device. In this study, we…
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