Material selection for MEMS devices
@article{Pratap2007MaterialSF,
title={Material selection for MEMS devices},
author={R. Pratap and A. Arunkumar},
journal={Indian Journal of Pure & Applied Physics},
year={2007},
volume={45},
pages={358-367}
}As MEMS design matures and migrates from process centric design to performance based design, MEMS designers would need a rational method for selecting an appropriate material that is not based on ease of processing alone. While there is a growing number of thin film materials that can be used in micromachining for MEMS devices, the selection of a particular material is rarely based on quantifiable criterion that relates directly to the optimum performance of the device. In this study, we… Expand
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