• Corpus ID: 13870733

Material selection for MEMS devices

@article{Pratap2007MaterialSF,
  title={Material selection for MEMS devices},
  author={Rudra Pratap and Arumugam Arunkumar},
  journal={Indian Journal of Pure \& Applied Physics},
  year={2007},
  volume={45},
  pages={358-367}
}
As MEMS design matures and migrates from process centric design to performance based design, MEMS designers would need a rational method for selecting an appropriate material that is not based on ease of processing alone. While there is a growing number of thin film materials that can be used in micromachining for MEMS devices, the selection of a particular material is rarely based on quantifiable criterion that relates directly to the optimum performance of the device. In this study, we… 

Figures and Tables from this paper

Material selection for optimum design of MEMS pressure sensors

A material selection case study addressing two challenges in optimum design of MEMS pressure sensors, individually as well as simultaneously, using Ashby’s method and finding candidate materials for optimum performance have been determined.

An Assessment of Bulk Metallic Glasses for Microelectromechanical System Devices

Metallic glasses were born purely of academic interest and earlier commercial attempts were limited due to the low thickness of the samples. However, with the successful fabrication of bigger samples

CAD ANALYSIS, MODELLING STRATEGY ANDSIMULATION OF ULTRA-MINIATURIZED MEMS BASEDINTEGRATEDACCELERATION AND SPIN SENSOR FOR SAMAPPLICATION

MEMS is a technology that bridges computer with an ultra-miniaturized device embedded in semiconductor microchip. Following paper outlines the computer aided design analysis of monolithic MEMS based

Comparative analysis of materials for the design of a highly sensitive capacitive type of MEMS pressure sensor

  • A. PreethiL. Chitra
  • Engineering
    2014 IEEE National Conference on Emerging Trends In New & Renewable Energy Sources And Energy Management (NCET NRES EM)
  • 2014
MEMS Comb drive type capacitive pressure sensor with high sensitivity can be used in many applications like Aerospace, Automobile, Bio MEMS, etc. This Paper is focused on the review of various types

A study on surface modification for tribological application in MEMS

This paper presents an investigation on combined surface modifications and their effects to tribological properties of Si (100) flat surfaces. At first, micro-patterns were fabricated on Si wafers

THE SYSTEMIC ANALYSIS OF METALS MANUFACTURING USED IN MEMS FABRICATION

The metals take a apart place in the materials range used at MEMSs fabrication, in special of associated materials, while of thin metals films are used in mediums with different capacities to obtain

Fabrication and flow rate characterization of a DRIE process based valveless piezoelectric micropump

Micropumps have become one of the major research topics in the field of microfluidics. Different actuators have been used in active micropumps including piezoelectric ones, which convert electrical