Material nonlinearity limits on a Lamé-mode single crystal bulk resonator

Abstract

In this paper, the material nonlinearity in single crystal silicon (SCS) square-plate bulk-mode resonators is described as a strain-dependent shear modulus and incorporated into a lumped element model. The equivalent circuit of the fully differential setup is developed for the nonlinear oscillation cases. According to measurement results, the spring… (More)
DOI: 10.1109/NEMS.2012.6196817

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